| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact potential detector configured to accurately detect a surface potential of a member.SOLUTION: A potential detector for detecting a surface potential of a member includes: at least two cantilevers with piezo-resistor arranged at different distances in a direction substantially perpendicular to the member; measurement means for measuring the surface potential of the member on the basis of deflection of the cantilever with piezo-resistor due to interatomic force acting between the member and the cantilever with piezo-resistor; and holding means for holding the two or more cantilevers with piezo-resistor at a predetermined distance. |
