PROCESS OF MANUFACTURING ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a process of manufacturing an electronic device including a process capable of suppressing excessive etching at a root of a metal pattern containing a metal seed layer at an underlayer.SOLUTION: The process of manufacturing an electronic device includes: forming an initial state seed layer 6 containing metal at an upper part of a ground layer 3; microcrystallizing the metal of the seed layer 6; recrystallizing the metal by annealing the seed layer 6 containing the microcrystallized metal; and forming a metal layer 8 on the annealed seed layer 6 by an electrolytic plating.