THIN FILM, METHOD OF MANUFACTURING SAME, AND DEVICE FOR MANUFACTURING SAME

摘要

Provided is a device for manufacturing a thin film. The device for manufacturing a thin film comprises: a tube including one end and the other end; a first heater for supplying heat to a first region adjacent to the one end of the tube; a second heater for supplying heat to a second region adjacent to the other end of the tube, and disposed alongside the first heater along the tube; a gas injection hole through which a source gas is supplied to the one end of the tube; and a gas discharge hole through which the source gas is discharged from the other end of the tube.