| 摘要 |
PROBLEM TO BE SOLVED: To provide a fan filter unit constituted so as to enhance the blowoff air velocity distribution of an air stream after passed through a filter. SOLUTION: The fan filter unit is constituted so that a suction port 1 is provided to the upper part of a chamber 5, a fan unit 4 is provided to the chamber 5, a filter 6 is provided on the downstream side of the fan unit 4 and one or a plurality of auxiliary air blowing fans 8 are provided between the fan 2 and the filter 6. The wind velocity just under a motor 3 and a support 7 is enhanced to be uniformized, the uniformity of a blowoff wind velocity distribution is enhanced and the life of the motor is extended by cooling the motor 3. COPYRIGHT: (C)2008,JPO&INPIT
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