发明名称 |
LIQUID SPRAYING DEVICE, APPARATUS FOR MANUFACTURING FLAT PANEL DISPLAY, FLAT PANEL DISPLAY, APPARATUS FOR MANUFACTURING SOLAR CELL PANEL, SOLAR CELL PANEL, AND LIQUID SPRAYING METHOD |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve landing accuracy of ink by correcting mechanical errors even if mechanical errors occur in a mechanism for carrying a carrier table mounting a substrate, and the like. <P>SOLUTION: A liquid spraying device jets ink at the timing of the intermittent feed of the carrier table 20 mounting the substrate 1 from an inkjet head 25 arranged with a plurality of nozzles to jet ink containing spacer beads downward during the intermittent feed. The device comprises: a linear motor means 21 for moving the carrier table 20 relative to the inkjet head 25; a storage portion 42 for detecting a shift due to mechanical errors of a stator 21F, X-axis guides 22 and the like of the linear motor means 21 by image-processing of the image of the substrate subjected to sampling processing to store the detected shift; and a table adjusting mechanism 30 for correcting the detected and stored shift. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
申请公布号 |
JP2010017621(A) |
申请公布日期 |
2010.01.28 |
申请号 |
JP20080178592 |
申请日期 |
2008.07.09 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
ARAKI MASAKI;KATAGIRI KENJI;IZAKI MAKOTO |
分类号 |
B05C11/00;B05C5/00;G02F1/1339;G09F9/00;H01L31/04 |
主分类号 |
B05C11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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