发明名称 |
MANGANESE TIN OXIDE BASED TRANSPARENT CONDUCTING OXIDE AND TRANSPARENT CONDUCTIVE FILM AND METHOD FOR FABRICATING TRANSPARENT CONDUCTIVE FILM USING THE SAME |
摘要 |
Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition of MnxSn1-xO (0<x≦0.055), and the multilayer transparent conductive film includes: a manganese tin oxide-based transparent conducting oxide having a composition of MnxSn1-xO (0<x≦0.055); a metal thin film deposited on the manganese tin oxide-based transparent conducting oxide; and a manganese tin oxide-based transparent conducting oxide having a composition of MnxSn1-x(0<x≦0.055) deposited on the metal thin film. |
申请公布号 |
US2016225479(A1) |
申请公布日期 |
2016.08.04 |
申请号 |
US201615014937 |
申请日期 |
2016.02.03 |
申请人 |
Korea Institute of Science and Technology |
发明人 |
CHOI Ji-Won;CHOI Won-Kook;KIM Jin Sang;YIM Haena |
分类号 |
H01B1/02;C01G45/00;H01L33/42;H01L29/43;H01L31/0224 |
主分类号 |
H01B1/02 |
代理机构 |
|
代理人 |
|
主权项 |
1. A manganese tin oxide-based transparent conducting oxide having a composition of MnxSn1-xO (0<x≦0.055). |
地址 |
Seoul KR |