发明名称 MANGANESE TIN OXIDE BASED TRANSPARENT CONDUCTING OXIDE AND TRANSPARENT CONDUCTIVE FILM AND METHOD FOR FABRICATING TRANSPARENT CONDUCTIVE FILM USING THE SAME
摘要 Disclosed is a manganese tin oxide-based transparent conducting oxide (TCO) with an optimized composition, which has low surface roughness, low sheet resistance and high transmittance even when deposited at room temperature, a multilayer transparent conductive film using the same and a method for fabricating the same. The manganese tin oxide-based transparent conducting oxide has a composition of MnxSn1-xO (0<x≦0.055), and the multilayer transparent conductive film includes: a manganese tin oxide-based transparent conducting oxide having a composition of MnxSn1-xO (0<x≦0.055); a metal thin film deposited on the manganese tin oxide-based transparent conducting oxide; and a manganese tin oxide-based transparent conducting oxide having a composition of MnxSn1-x(0<x≦0.055) deposited on the metal thin film.
申请公布号 US2016225479(A1) 申请公布日期 2016.08.04
申请号 US201615014937 申请日期 2016.02.03
申请人 Korea Institute of Science and Technology 发明人 CHOI Ji-Won;CHOI Won-Kook;KIM Jin Sang;YIM Haena
分类号 H01B1/02;C01G45/00;H01L33/42;H01L29/43;H01L31/0224 主分类号 H01B1/02
代理机构 代理人
主权项 1. A manganese tin oxide-based transparent conducting oxide having a composition of MnxSn1-xO (0<x≦0.055).
地址 Seoul KR