MEMS TILT SENSOR

摘要

An acoustic sensor includes a back plate; at least one back plate electrode coupled to the back plate; a proof of mass with the proof of mass elastically coupled to the back plate; and a proof of mass electrode coupled to the proof of mass. Movement of the sensor causes a capacitance between the proof of mass electrode and the at least one back plate electrode to vary and the capacitance represents a magnitude of the movement of the sensor.

主权项

1. A microelectromechanical system (MEMS) microphone comprising:
a substrate; a MEMS microphone disposed on the substrate; an integrated circuit coupled to the MEMS microphone; a tilt sensor disposed on the substrate, the tilt sensor comprising:
a back plate;at least one back plate electrode disposed on the back plate;a proof of mass coupled to the back plate; anda sensing electrode coupled to the proof of mass that moves relative to the back plate, wherein movement of the MEMS microphone moves the sensing element relative to the back plate such that the distance between the sensing electrode and the at least one back plate electrode changes, wherein a capacitance between the sensing electrode and the at least one back plate electrode is communicated to the integrated circuit, wherein the integrated circuit determines an orientation of the MEMS microphone based upon the capacitance.