DEVICE AND MANUFACTURING METHOD FOR THE SAME, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a wire with the excellent electric characteristics, or a wire with the stable electric characteristics.SOLUTION: A manufacturing method for a semiconductor device includes: forming a first insulating film on a substrate; forming a second insulating film on the first insulating film; forming a first opening by removing a part of the first insulating film and a part of the second insulating film; forming a first conductor in the first opening and on an upper surface of the second insulating film; forming a second conductor by flattening a surface of the first conductor and removing a part of the first conductor; forming a third insulating film on the second insulating film and the second conductor; providing a second opening to expose a part of an upper surface and a part of a side surface of the second conductor by removing a part of the second insulating film and a part of the third insulating film; forming a third conductor on an upper surface of the third insulating film and in the second opening in contact with the second conductor; and forming a fourth conductor by removing a part of the third conductor.SELECTED DRAWING: Figure 1