AXIS ALIGNMENT DEVICE OF CHARGED PARTICLE OPTICAL SYSTEM AND CHARGED PARTICLE OPTICAL DEVICE

摘要

PROBLEM TO BE SOLVED: To simply and correctly align an axis without imparting adverse influence in aligning the axis of a lens and to prevent the lens from moving again by automatically solidly fixing it with frictional force after the axis alignment, in relation to an axis alignment device of a charged particle optical system comprising one or more magnetic field type or a static type lenses and a charged particle optical device. SOLUTION: This axis alignment device of a charged particle optical device is provided with: a driving unit used for moving a lens in a certain direction and composed of at least a piezoelectric element and a rotor fixed by frictional force and moving in a certain direction; and a means for aligning the axis by moving the lens by applying a voltage of a traveling wave to the piezoelectric element constituting the driving unit. COPYRIGHT: (C)2006,JPO&NCIPI