| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a magnetic disk unit including the step of flattening the surface of a component, in particular, of a magnetic head of the magnetic disk unit by reducing working damage into a nm level using gas cluster ion beams. SOLUTION: The method includes flattening a floating surface of the magnetic head of the magnetic disk unit by irradiating the magnetic head with gas cluster ion beams of which the kinetic energy of ions is adjusted into desired value, from such a direction that an angle (radiation angle) to the normal of the magnetic head floating surface is from 50°or larger to 90°or smaller while rotating the magnetic head with the normal direction of the magnetic head floating surface as a rotary axis. COPYRIGHT: (C)2006,JPO&NCIPI
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