| 发明名称 |
Method for improving germanide growth and devices obtained thereof |
| 摘要 |
The present invention is related to the field of semiconductor processing and, more particularly, to the formation of low resistance layers on germanium substrates. |
| 申请公布号 |
EP2031644(A2) |
申请公布日期 |
2009.03.04 |
| 申请号 |
EP20080163442 |
申请日期 |
2008.09.01 |
| 申请人 |
IMEC |
发明人 |
BRUNCO, DAVID;MEURIS, MARC |
| 分类号 |
H01L21/285 |
主分类号 |
H01L21/285 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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