| 摘要 |
PROBLEM TO BE SOLVED: To provide an image processing method and a microscope device with resolution thereof enhanced. SOLUTION: This image processing method is based on a plurality of images of a surface of an object acquired by an imaging device while relatively moving the object with respect to the imaging device. This processing method comprises steps S101 to S103. At the steps S101 to S102, portions each corresponding to the same spot on a surface of the object are extracted from the plurality of images while the surface heights of the object are acquired from the signal intensities of the extracted portions to acquire the frequency distribution of the surface heights. At the step S103, the probability density function of the surface heights is calculated based on the frequency distribution to acquire a surface height that maximizes the density function as a true value of the surface height. COPYRIGHT: (C)2010,JPO&INPIT |
