发明名称 PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 A projection optical system for forming an image of a first surface (Ma) on a third surface (W) has a first imaging optical system (G1), a third imaging optical system (G3), and a first folding member (M1) for guiding light from the first imaging optical system to the third imaging optical system. Every optical element having a power in the third imaging optical system is a refractive element.
申请公布号 KR20100014351(A) 申请公布日期 2010.02.10
申请号 KR20097015948 申请日期 2008.04.16
申请人 NIKON CORPORATION 发明人 OMURA YASUHIRO
分类号 H01L21/027 主分类号 H01L21/027
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