Vacuum Pump

摘要

An object is to provide a vacuum pump that enables, without being affected by a flow rate of gas to be discharged, concentrated and efficient heating of only a stator component of an exhaust side gas channel that needs to be heated in order to prevent deposition of products and that also enables prevention of deposition of products in the exhaust side gas channel as a result of the heating, and improvement of pump emission performance. The vacuum pump has a rotor rotatably arranged on a pump base and a gas channel through which gas sucked by rotation of the gas is guided to an outlet port, and further includes heat insulating means for thermally insulating a stator component, which forms an exhaust side gas channel in the gas channel, from other components and heating means for heating the thermally insulated stator component.

主权项

1. A vacuum pump comprising a pump base, a rotor arranged on the pump base, a supporting and driving means for supporting the rotor so as to enable the rotor to rotate around an axis thereof and rotationally driving the rotor, and a gas channel through which gas sucked by rotation of the rotor is guided to an outlet port, wherein the vacuum pump comprises
a heat insulating means for thermally insulating a stator component, which forms an exhaust side gas channel in the gas channel, from other components; and a heating means for heating the stator component thermally insulated by the heat insulating means.