发明名称 LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a laser processing apparatus and a laser processing method, capable of efficiently collecting debris occurring at laser processing, for removing it from a work piece.SOLUTION: A laser processing apparatus includes a holding means for holding a work piece, a laser beam radiation means which contains a laser beam oscillation means, and a process head containing a condenser lens for focusing laser beam oscillated by the laser beam oscillation means, for radiating the laser beam to the work piece held by the holding means, and a debris collecting means which contains a sucking path in which a passage hole through which the laser beam that is condensed by the condenser lens and focused on the work piece passes is formed, extending in symmetrical manner about the passage hole, and a sucking source to which one end and the other end of the sucking path are respectively and selectively connected, for collecting debris occurring when the laser beam condensed by the condenser lens is radiated to the work piece.
申请公布号 JP2014205159(A) 申请公布日期 2014.10.30
申请号 JP20130083161 申请日期 2013.04.11
申请人 DISCO ABRASIVE SYST LTD 发明人 MICHAEL WILLIAM GADD
分类号 B23K26/16;B23K26/064 主分类号 B23K26/16
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