| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure reduction device and a pressure reduction method that can suppress sticking of particles on a workpiece.SOLUTION: A pressure reduction device includes a vessel capable of maintaining an atmosphere of reduced pressure lower than the atmospheric pressure; an evacuation portion which discharges the air in the vessel; a support plate which is provided inside the vessel and has a flat principal surface; a support which is provided on the principal surface of the support plate and supports a workpiece; and a member which forms a gap between the support plate and an inner wall on a bottom side of the vessel. The size of the principal surface of the support plate is larger than the size of the workpiece, and the support body is columnar and provided with an inclined surface for supporting the workpiece at one end, a dimension H between the workpiece supported by the support body and the support plate and a thickness T of the workpiece satisfying an expression 8. |
