发明名称 Method to enhance sensitivity to surface normal optical functions of anisotropic films using attenuated total reflection
摘要 Methodology for determining optical functions of thin films with enhanced sensitivity to “p” polarized electromagnetic radiation reflected from both interfaces of an absorbing film.
申请公布号 US2016274032(A1) 申请公布日期 2016.09.22
申请号 US201614999365 申请日期 2016.04.28
申请人 J.A. WOOLLAM CO., INC. 发明人 Tiwald Thomas E.;Van Derslice Jeremy A.
分类号 G01N21/84;G01M11/00;G02B5/04;G02B5/06;G02B5/30;G02B1/11 主分类号 G01N21/84
代理机构 代理人
主权项 1. A method to enhance sensitivity to surface-normal optical functions of anisotropic absorbing thin films using attenuated total reflection comprising the steps of: in either order, steps a) and b): a) providing a transparent prism having three sides, a first and second of which are offset from one another by an apex angle which is sufficient to cause total reflection of an electromagnetic beam entered into the first side of the transparent prism, at the third side of the transparent prism when the ambient is air;b) providing a transparent substrate having first and second substantially parallel sides separated by a substrate thickness;c) depositing an anisotropic absorbing thin film on one side of said substrate, said anisotropic absorbing thin film having two sides;d) positioning said third side of said prism which is opposite the apex angle in contact with the side of the substrate opposite that onto which was deposited the anisotropic absorbing thin film;e) causing an incident beam of electromagnetic radiation to enter the first of said two sides of said transparent prism that are offset from one another by said apex angle along a locus such that said beam passes through said transparent prism and transparent substrate, totally internally reflects from both sides of said anisotropic absorbing thin film, passes back through said transparent substrate and transparent prism and exists the second side thereof;f) applying a detector of said electromagnetic radiation placed at a position such that said beam of electromagnetic radiation that exists said second side of said prism enters thereinto;g) analyzing data produced by said detector to determine surface-normal optical properties of said anisotropic absorbing thin film with increased sensitivity, as compared to results achievable by direct investigation thereof; said method being characterized in that no waveguide effects are required for it to achieve its results, and in that no materials are added to the system after steps a)-d) during use that serve to change reflectivity in said system.
地址 Linciln NE US