DEPOSITING SOURCE APPARATUS WITH COOLING SHIELD

摘要

The present invention relates to a deposition source device with cooling shield comprising: a body accommodating deposition materials inside; a nozzle combining unit arranged vertical to a longitudinal direction of the body on the upper part of the body; a plurality of spray nozzles protruding from the upper part of the nozzle combining unit; and a heater unit for heating the body, nozzle combining unit, and spray nozzles. The deposition source device with cooling shield includes: a flat first cooling shield covering the deposition source device on the upper side of the nozzle combining unit and spray nozzles to block heat from the heater unit; and a second cooling shield formed at the upper area of the nozzle combining unit on the upper part of the first cooling shield, formed to correspond to the length and width of the nozzle combining unit, and having a combining ball to combine it to the spray nozzles at the center. The present invention additionally includes the first cooling shield at the upper area of the deposition source device and second cooling shield at spray nozzle adjacent unit and nozzle combining unit at the upper part of the first cooling shield, thereby protecting a substrate by preventing direct heat transmission to the substrate by blocking the heater unit of the spray nozzles which are not completely shielded by the first cooling shield.