ARC EVAPORATOR WITH A POWERFUL MAGNETIC GUIDE FOR TARGETS HAVING A LARGE SURFACE AREA,申请号EP20010915437-传众专利搜索

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发明名称	ARC EVAPORATOR WITH A POWERFUL MAGNETIC GUIDE FOR TARGETS HAVING A LARGE SURFACE AREA
摘要
申请公布号	EP1382711(B1)	申请公布日期	2004.09.22
申请号	EP20010915437	申请日期	2001.03.27
申请人	ES	发明人	ES
分类号	H01J37/32;C23C14/24;C23C14/32;C23C14/35;(IPC1-7):C23C14/35	主分类号	H01J37/32
代理机构		代理人
主权项
地址

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