| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aligner capable of performing exposure transfer precisely by performing the exposure transfer of a substrate and loading the substrate to a substrate stage simultaneously, reducing cycle time, and excluding influence to exposure precision by vibration generated when loading the substrate. <P>SOLUTION: The aligner PE comprises: a mask stage 10 for holding a mask M, a main bed 19 positioned at the lower portion of the mask stage 10, a first sub bed 15 and a second sub bed 16 arranged at the side of the main bed 19, first and second substrate stages 11, 12 capable of moving between the main bed 19 and the first and second sub beds 15, 16, and an irradiator 13 for irradiating the substrate W with light for pattern exposure via the mask M. The first and second sub beds 21, 22 have pieces of active damping apparatus 53, 54, respectively, having a vibration detector 51 for detecting vibration, and a shaker 52 for oscillating vibration in an opposite phase to that detected by the vibration detector 51. <P>COPYRIGHT: (C)2008,JPO&INPIT |
