| 摘要 |
<p>A hydrogen sensor comprising:
a substrate,
a detection film which is formed on the substrate and is composed of a rare earth metal,
a protection film which is formed on the detection film and is a dispersion of hydrogen-permeable metal particles in a ceramic material, and
a pair of electrodes which is formed apart on the protection film and are electrically connected with the detection film via the protection film. The hydrogen-permeable metal particles are Pd, Pt, Nb, V and Ta and the preferable content thereof is 20 to 70% by mass. It is preferred that the resistance of the protection film between the electrodes is 10 to 100,000 © and that the resistance of the detection film in the interelectrode direction is smaller than the resistance of the protection film in the interelectrode direction.</p> |
