发明名称 |
LASER WORKING METHOD AND LASER WORKING APPARATUS |
摘要 |
An object to be processed 1 is irradiated with a laser light L modulated by a reflection type spatial light modulator 203 such that aberration of the laser light L converged inside the object 1 becomes a predetermined aberration or less. Therefore, aberration of the laser light L generated at a position on which a converging point P of the laser light L is located is made as small as possible, to enhance the energy density of the laser light L at that position, which makes it possible to form a modified region 7 with a high function as a starting point for cutting. In addition, because the reflection type spatial light modulator 203 is used, it is possible to improve the utilization efficiency of the laser light L as compared with a transmissive type spatial light modulator. Such improvement of the utilization efficiency of the laser light L is particularly important in the case in which the modified region 7 serving as a starting point for cutting is formed in the plate-shaped object 1. |
申请公布号 |
EP2186596(B1) |
申请公布日期 |
2016.06.08 |
申请号 |
EP20080791766 |
申请日期 |
2008.07.28 |
申请人 |
HAMAMATSU PHOTONICS K.K. |
发明人 |
NAKANO, MAKOTO;KUNO, KOJI;OSAJIMA, TETSUYA;INOUE, TAKASHI;KUMAGAI, MASAYOSHI |
分类号 |
B23K26/38;B23K26/00;B23K26/04;B23K26/06;B23K26/40;B28D5/00;C03B33/09 |
主分类号 |
B23K26/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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