超伝導トンネル接合を用いたフォトン検出器

摘要

PROBLEM TO BE SOLVED: To provide a photon detector in which yield of production is improved and production processes are reduced.SOLUTION: A photon detector 31 is formed by embedding an STJ element 32 in a hole 33a formed on a surface of a substrate 33 in a rectangularly recessed state. A surface of an upper electrode 36 composing the STJ element 32 and the surface of the substrate 33 are made flash with each other. A part of a lower electrode 34 is formed so as to be exposed to the hole 33a. A lower electrode wiring layer 38 for wiring the lower electrode 34 is formed on an upper left surface of the substrate in contact with a part of the lower electrode 34 exposed to the hole 33a. An upper electrode wiring layer 37 for wiring the upper electrode 36 is formed on an upper right surface of the substrate 33 in contact with the surface of the upper electrode 36.