| 摘要 |
PROBLEM TO BE SOLVED: To provide a photo-detection device capable of selectively detecting light of specific wavelengths in the ultraviolet region with high sensitivity.SOLUTION: A photo-detection device includes: a first photo-detection unit (photodiode PD1) having a first optical filter 74 which absorbs light of a first given wavelength range λ in the ultraviolet region; and a second photo-detection unit PD2 having a second optical filter 76 which absorbs light of a second wavelength range λ1, that includes the first wavelength range λ, in the ultraviolet region. The first optical filter 74 and the second optical filter 76 comprise optical filters which selectively absorb light of specific wavelengths in the ultraviolet region. Intensity of light of the first wavelength range λ can be computed using a signal from the first photo-detection unit PD1 and a signal from the second photo-detection unit PD2. |
