发明名称 HIGH ELECTRON MOBILITY TRANSISTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a high electron mobility transistor (HEMT) device.SOLUTION: A high electron mobility transistor includes a heterojunction, a gate layer 308, and a gate electrode 310. The heterojunction includes a barrier layer 306 formed on a channel layer 304, and the barrier layer 306 and channel layer 304 contain a group III-V semiconductor material. The gate layer 308 contains a P type group III-V semiconductor material formed on the barrier layer 306. The gate electrode 310 is formed on the gate layer 308, and contains an indium tin oxide (ITO) bonded electrically to the gate layer 308. The gate electrode 310 and gate layer 308 have the substantially same length.SELECTED DRAWING: Figure 3
申请公布号 JP2016174140(A) 申请公布日期 2016.09.29
申请号 JP20150231705 申请日期 2015.11.27
申请人 TOSHIBA CORP 发明人 HE YONG-XIANG;ZHANG XINYU
分类号 H01L21/337;H01L21/338;H01L27/098;H01L29/778;H01L29/808;H01L29/812 主分类号 H01L21/337
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