| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of vibrating a case by a drive vibration of an angular velocity sensor element and transferring the vibration as a rotational movement in X, Y and Z axial direction to thereby improve the accuracy of output signals free from generation of undesired signals different from angular speed detection signals.SOLUTION: The angular velocity sensor has a resin base 42 which is formed integrally with a case placement member 41 via a lead frame 39, and has an outside connection terminal 43 disposed on the outside surface. The lead frame 39 is supported by the case placement member 41 and the base 42 at both ends thereof so that a unique vibration number of the lead frame generally coincides with the drive frequency of the angular velocity sensor element 21 to thereby prevent the generation of undesired signals.SELECTED DRAWING: Figure 7 |
