| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measuring method capable of removing various problems caused by wrong measurement by discriminating precisely the wrong measurement in measurement of the surface shape utilizing a device equipped with a two-beam interference optical system. SOLUTION: In this surface shape measuring method, a lightness modulation quantity in the scanning direction on an observation object portion is calculated from image data acquired by observing the substrate surface which is an observation object by using the two-beam interference optical system, while scanning in the normal direction of the observation object portion on the substrate (step S3), and the height or the depth of the observation object portion is measured from the lightness modulation quantity acquired by calculation (step S4). Then, it is determined whether the measured value on the observation object portion measured in the step S4 is wrong measurement or not from a lightness modulation domain acquired by extracting in the scanning direction, the lightness modulation quantity exceeding a reference value set beforehand among the lightness modulation quantities acquired relative to the observation object portion. COPYRIGHT: (C)2006,JPO&NCIPI
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