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发明名称
Förfarande att tillverka vertikala avlånga nanostrukturer och nanostrukturer därav
摘要
申请公布号
SE1330066(A1)
申请公布日期
2014.11.22
申请号
SE20130030066
申请日期
2013.06.17
申请人
MARTIN ANDREAS OLSSON
发明人
MARTIN ANDREAS OLSSON
分类号
H01L29/775;B82Y10/00;B82Y40/00;H01L29/06
主分类号
H01L29/775
代理机构
代理人
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