| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized, thin triaxial acceleration sensor which can achieve both high sensitivity and high impact resistance. <P>SOLUTION: An IC restriction plate is fixed to a case upper inner undersurface. An acceleration sensor element is bonded between an IC restriction plate undersurface and a case lower inner undersurface with a silicone-rubber-based adhesive into which hard plastic spheres are kneaded. This structure prevents damage to a beam section even when an excessive impact is applied from the case toward a case lid of the acceleration sensor. By minimizing the amount of the adhesive on the IC restriction plate and a support frame section, noise originating from adhesive stress can be reduced, achieving both high sensitivity and high impact resistance. <P>COPYRIGHT: (C)2008,JPO&INPIT |
