PICKER MODULE AND APPARATUS FOR TREATMENTING SUBSTRATE INCLUDING THE SAME

摘要

PURPOSE: A picker module and a substrate treatment apparatus including the same are provided to gather a substrate on a tray by installing a spray nozzle for spraying a compressed air. CONSTITUTION: An upper plate(66) moves according to a second path. A plurality of picker support stands are installed in the lower part of the upper plate. A picker pad(70) is attached to the lower end of a plurality of picker support stands. The picker pad absorbs a substrate connected to the upper plate. The picker pad includes a unit for removing a residual pressure between the substrate and a tray.