PURPOSE: A waste gas scrubber is provided to improve the process efficiency of a waste gas by using separable fillers for cleaning an absorbed powders and byproducts and increasing a flow path for the waste gas. CONSTITUTION: The combustion or the thermal decomposition of a wafer gas injected from a gas inlet is performed in a heating chamber(100). An wet chamber(200) includes powders passed through the heating chamber, a plurality of baffle boards and fillers filled in the baffle boards. A drain tank(400) is placed under the heat chamber and the wet chamber. The drain tank drains the powders which are generated from the heat chamber or the wet chamber or waste water in which the waste gas is melted.
申请公布号
KR20100021135(A)
申请公布日期
2010.02.24
申请号
KR20080079882
申请日期
2008.08.14
申请人
UNISEM CO., LTD.
发明人
JUNG, SUN WOOK;PARK, KI JOONG;KIM, JE HO;LEE, KYU MAN;PARK, JAE SUNG;KIM, JEONG HOON;KIM, SEUNG HWAN