发明名称 |
MANUFACTURING METHOD OF CONDUCTIVE MEMBER FOR ELECTRONIC CONSTITUENT INCLUDING END WITH CAVITY |
摘要 |
PROBLEM TO BE SOLVED: To provide a simple method for manufacturing a member that is conductive and has tolerance because of a mechanical stress.SOLUTION: The method for manufacturing a conductive member for an electronic constituent includes the following steps, namely, of: preparing a structure including at least one blind hole including a bottom face and at least one inner side face connected to the bottom face via a proximal region; and forming the member. The formation step includes a step of growing a conductive material in order to form at least a part of the member within the blind hole. The growth is earlier than growth in a remaining portion on the side face in the proximal region of the side face of the blind hole. The member includes a cavity that is disposed at an end of the member that is positioned at an opposite side of the bottom face of the blind hole when formed. In the cavity, a boundary is defined entirely or partially by a rim.SELECTED DRAWING: Figure 1 |
申请公布号 |
JP2016178201(A) |
申请公布日期 |
2016.10.06 |
申请号 |
JP20150057235 |
申请日期 |
2015.03.20 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES |
发明人 |
BRUN JEAN;ABDELHAK HASSAINE;JEAN-MARIE QUIMPER;TAILLEFER REGIS |
分类号 |
H01L21/60;H01L23/14 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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