发明名称 POLYCRYSTALLINE SEMICONDUCTOR LAYER AND FABRICATING METHOD THEREOF
摘要 The present application discloses a method of fabricating a polycrystalline semiconductor layer, comprising forming a heat storage layer; forming a buffer layer on the heat storage layer; forming a first amorphous semiconductor layer on a side of the buffer layer distal to the heat storage layer; and crystallizing the first amorphous semiconductor layer to form a first polycrystalline semiconductor layer.
申请公布号 WO2016184114(A1) 申请公布日期 2016.11.24
申请号 WO2015CN99239 申请日期 2015.12.28
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 XU, Wenqing;TIAN, Hongwei;LONG, Chunping
分类号 H01L21/77;H01L29/786 主分类号 H01L21/77
代理机构 代理人
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