发明名称 SOI TYPE MOSFET
摘要 A buried insulating film is formed in an LDD region between a source region and a drain region, and a non-doped silicon film is formed in the SOI layer above the buried insulating film. The SOI layer lying under the buried insulating film has a body concentration of 10<18 >cm<-3>.
申请公布号 US2005040464(A1) 申请公布日期 2005.02.24
申请号 US20030730094 申请日期 2003.12.09
申请人 MIURA NORIYUKI 发明人 MIURA NORIYUKI
分类号 H01L21/336;H01L21/84;H01L27/01;H01L27/12;H01L29/786;H01L31/0392;(IPC1-7):H01L27/01;H01L31/039 主分类号 H01L21/336
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