发明名称 Abrasive machine and method of abrading a workpiece using a pressure vessel
摘要 <p>The abrasive machine (10) of the present invention is capable of changing pressure applied to a work piece and easily defining optimum abrading conditions. The abrasive machine (10) comprises: a pressure vessel (12) capable of increasing and reducing inner pressure; an abrasive plate (23) provided in the pressure vessel (12); a pressing plate (36) provided on the abrasive plate (23), the pressing plate (36) pressing the work piece onto the abrasive plate (23); a driving unit (35, 64, 68) relatively moving the abrasive plate (23) with respect to the pressing plate (36) so as to abrade the work piece; and a pressure source (47, 48) connected to the pressure vessel (12), the pressure source (47, 48) increasing or reducing the inner pressure of the pressure vessel (12). &lt;IMAGE&gt;</p>
申请公布号 EP1316393(B1) 申请公布日期 2007.05.02
申请号 EP20020258141 申请日期 2002.11.27
申请人 DOY, TOSHIROH;FUJIKOSHI MACHINERY CORP. 发明人 DOY, TOSHIROH
分类号 B24B49/14;B24B37/015;B24B37/04;B24B41/047;B24B57/02;H01L21/304 主分类号 B24B49/14
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