| 摘要 |
PROBLEM TO BE SOLVED: To largely shorten the measurement time for acquiring height data at a plurality of times required for displaying moving image display of an MEMS (Micro Electro Mechanical System) operation. SOLUTION: A stroboscopic phase shift interference device sets optical path difference, measures the height of the MEMS under operation at a plurality of phases at three or more points with respect to the set optical path difference, calculates an estimation equation of height locus of the MEMS under operation, and determines the shape of the MEMS under operation by calculation. COPYRIGHT: (C)2007,JPO&INPIT
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