| 摘要 |
PROBLEM TO BE SOLVED: To provide an anomaly prediction device of a heater of a heat treatment furnace capable of predicting occurrence of anomaly of the heater in advance. SOLUTION: When three conditions are satisfied that the heat treatment furnace 1 is airtightly sealed, that a set value of electric power by an electric power setting part 16 is the maximum value (equivalent to that of a thyristor circuit 6 as an energization control part has the maximum output), and that a detection temperature t of the heater 2 is made to have a prescribed value t1, a resistance value of the heater 2 is measured, and detected resistance R is obtained. Based on comparison of the precise and stable detected resistance R (measured value) and a prescribed anomaly precursory range, signs of anomalies are predicted. COPYRIGHT: (C)2008,JPO&INPIT
|
