MANUFACTURING METHOD FOR ARRAY SUBSTRATE, DISPLAY SUBSTRATE AND DISPLAY DEVICE

摘要

A manufacturing method for an array substrate, a display substrate and a display device. The manufacturing method for an array substrate comprises: forming a pattern comprising an active layer (01) and a source/drain electrode (02) on a base substrate; forming patterns of a first transparent electrode (05) and a passivation layer (04) through a single patterning process; and processing the base substrate on which the pattern of the passivation layer (04) is formed, so that a material of the passivation layer (04) is at least partially filled in a gap of the pattern of the first transparent electrode (05), wherein by way of forming the patterns of the first transparent electrode (05) and the passivation layer (04) via a single patterning process, the number of mask plates used during the manufacturing of an array substrate can be reduced, and accordingly the manufacturing process of an array substrate can be simplified, thereby reducing the production cost of the array substrate.