| 摘要 |
PROBLEM TO BE SOLVED: To provide a microwave irradiation device in which emission of a microwave from a microwave source is unlikely to be stopped unnecessarily based on a detection result of a temperature of an output window.SOLUTION: The device comprises: a microwave source 10 by which a microwave of which the frequency is 10 GHz to 300 GHz is generated and emitted from an output window 11a; a reflection mechanism 20 which reflects and converges the microwave that is emitted from the output window 11a; and a mounting platform 30 on which an object (heated object) to be irradiated with the microwave reflected by the reflection mechanism 20 is mounted. In the device, a permeation plate formed from a "microwave permeable material" of which the "half reduction depth" is 100 mm or more is interposed in a region where the microwave is passed, between the "output window 11a" and the "heated object mounted on the mounting platform 30". The permeation plate also has a property that an infrared ray is not permeated (an infrared ray is absorbed). Further, a cooling device 50 that cools the permeation plate is provided.SELECTED DRAWING: Figure 3 |
