发明名称 METHOD OF MANUFACTURING ARRAY SUBSTRATE, DISPLAY SUBSTRATE, AND DISPLAY DEVICE
摘要 A method of manufacturing an array substrate, a display substrate and a display device are disclosed. The method of manufacturing an array substrate comprises: forming a pattern of an active layer and a pattern of source and drain electrodes on a substrate; forming a pattern of a first transparent electrode and a pattern of a passivation layer through one single patterning process; and processing the substrate on which the pattern of the passivation layer having been formed, such that a material of the passivation layer fills at least partially in a gap in the pattern of the first transparent electrode. Through forming the pattern of the first transparent electrode and the passivation layer by one single patterning process, number of masks used in the manufacturing process of the array substrate is reduced.
申请公布号 US2016372499(A1) 申请公布日期 2016.12.22
申请号 US201515122168 申请日期 2015.07.28
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 CHOI Seung Jin;KIM Hee Cheol;CHOI Hyun Sic
分类号 H01L27/12;H01L21/324;H01L21/308;H01L21/3213 主分类号 H01L27/12
代理机构 代理人
主权项 1. A method of manufacturing an array substrate, comprising steps of: forming a pattern of an active layer and a pattern of source and drain electrodes on a substrate; forming a pattern of a first transparent electrode and a pattern of a passivation layer through one single patterning process; and processing the substrate on which the pattern of the passivation layer has been formed, such that a material of the passivation layer fills at least partially in a gap in the pattern of the first transparent electrode.
地址 Beijing CN