WORKPIECE TRANSPORT AND POSITIONING APPARATUS

摘要

An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.

主权项

1. An automated workpiece processing apparatus comprising:
a processing section including a processing module configured for processing a workpiece at a process location; a transport module including a multistage shuttle, the multistage shuttle having
a first shuttle stage having multiple degrees of freedom of motion,a second shuttle stage having multiple degrees of freedom of motion independent of the first stage, andan end effector connected to at least one of the first and second shuttle stages, the end effector being configured to hold the workpiece and transport the workpiece into and out of the processing module, the end effector having a range of motion, defined by a combination of the first and second stage multiple degrees of freedom of motions, extending from a workpiece holding station outside the processing module to the processing location inside the processing module for positioning the workpiece at the processing location so that the end effector defines a processing stage of the processing module; and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, the automated loading and transport section being communicably connected to the transport module.