| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a debris reducing system, used for trapping pollutant materials emitted from a radiation source which generates debris, and can make debris reduction effect improved by a rotation foil trap. <P>SOLUTION: This debris reducing system is provided with a contamination barrier constituted so as to rotate about a shaft, and a magnet structure, constituted so as to provide a magnetic field for deflecting electric charge debris from the radiation source. The magnet structure is constituted so that magnetic field is provided through the contamination barrier. The magnetic field is oriented along a surface which substantially coincides with the rotating shaft of the contamination barrier, when it passes through the contamination barrier. <P>COPYRIGHT: (C)2008,JPO&INPIT |
