| 摘要 |
<P>PROBLEM TO BE SOLVED: To position a stage module 30 for frame casters. <P>SOLUTION: When the stage module 30 is carried into the frame casters (leg portions) 39A-39C, second members (43B, 143B and 243B) forming positioning mechanisms 16A-16C are pressed to first members (43A, 143A and 243A) and the spherical portion of the second member contacts with the V grooves of the first members in at least two portions. Thus, the stage module 30 can be positioned with respect to a horizontal plane and a height direction for the frame casters. <P>COPYRIGHT: (C)2008,JPO&INPIT |
