| 摘要 |
Provided is a sliding part such as a mechanical seal for sealing a silicate-containing fluid to be sealed such as LLC with silicate added, wherein leaking due to sedimentation of the silicate compound is prevented. Provided is a sliding part comprising an annular fixing-side sealing ring (5) fixed to a fixing side and an annular rotating-side sealing ring (3) that rotates together with a rotating shaft (1), opposing sliding surfaces (S) of the fixing-side sealing ring (5) and the rotating-side sealing ring (3) being rotated relative to each other, whereby a fluid to be sealed present on one diametrical side of the relatively rotatably-sliding sliding surfaces is sealed; the sliding part characterized in that the fluid to be sealed is a silicate-containing fluid, and an amorphous carbon film (10) formed in plasma CVD using a hydrocarbon gas containing no organic silicon compound gas is laminated over at least one sliding surface of the fixing-side sealing ring (5) or the rotating-side sealing ring (3). |
