发明名称 IMAGING PANEL AND X-RAY IMAGING DEVICE EQUIPPED WITH SAME
摘要 Provided are an imaging panel and imaging device capable of reducing X-ray irradiation and suppressing a shift in TFT threshold voltage during X-ray irradiation. An imaging panel equipped with an imaging unit containing a plurality of pixels 13 for generating an electric charge based on X-rays emitted from an X-ray source, and a thin-film transistor 14 for reading the electric charge generated in the pixels 13. The thin-film transistor 14 has a gate 141, an oxide semiconductor layer 142, and a source 143S and a drain 143D that are formed in one section on the oxide semiconductor layer 142 by wet-etching a metal film formed on the oxide semiconductor layer 142. The oxide semiconductor layer 142 contains indium, tin, gallium, and oxygen.
申请公布号 WO2016167277(A1) 申请公布日期 2016.10.20
申请号 WO2016JP61890 申请日期 2016.04.13
申请人 SHARP KABUSHIKI KAISHA 发明人 SAITOH Takao;KANEKO Seiji;TAKAMARU Yutaka;KANZAKI Yohsuke
分类号 H01L27/146;G01T7/00;H01L21/336;H01L27/144;H01L29/786;H04N5/32;H04N5/369 主分类号 H01L27/146
代理机构 代理人
主权项
地址