| 摘要 |
A static pressure seal-equipped motor (1) in which front and rear gaps are sealed by first and second static pressure seal portions (30, 40) disposed at first and second axial end portions (12a, 12c) of a motor rotating shaft (12) protruding toward front and rear. Sealing gas supplied to sealing gaps (32, 42) of the first and second static pressure seal portions (30, 40) is caused to diverge and flow to chemical liquid atmospheres (5a, 5b) and a motor chamber (18) or an encoder chamber (21). The diverged flows of sealing gas prevent entry of dust from the motor chamber (18) or the encoder chamber (21) into the chemical liquid atmospheres (5a, 5b), and also prevent entry of chemical liquid-containing gas from the chemical liquid atmospheres (5a, 5b) into the motor chamber (18) or the encoder chamber (21). |
