| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device capable of being housed within a height limit during transportation and omitting an assembly and adjustment step after carrying-in, and equipped with a conveying device of a multistage elevating system.SOLUTION: A substrate processing device for transporting a substrate housing container comprises: a conveying device which includes a base unit, a first drive unit disposed in the base unit, a first table 96 which slides when the first drive unit operates, a second drive unit disposed in the first table, and a second table 99 which moves the substrate housing container when the second drive unit operates, and conveys the substrate housing container; and a control unit which is connected to the first drive unit and the second drive unit, transmits a signal to the first drive unit and the second drive unit, and controls the first table and the second table so as to make them slide synchronously. |
