| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface shape measurement device and a surface shape measurement method that allow a single measurement device to implement a measurement from an entire shape of a workpiece to surface roughness thereof.SOLUTION: A surface shape measurement device 100 comprises: a contactless sensor 122; and a surface shape sensor unit 120 that includes a first drive unit 124 causing the contactless sensor 122 to move in a direction of a measurement axial line M, and a second drive unit 126 causing the first drive unit to move in the same direction. The first drive unit 124 includes a piezo-actuator that has a first movable range broader than a detection limit of the contactless sensor 122, and the second drive unit 126 includes a rectilinear movement table that has a second movable range broader than the first movable range. A surface shape measurement of a workpiece W1 is implemented while causing two actuators to move the contactless sensor in the direction of the measurement axial line M so that a measuring point D of the contactless sensor 122 remains located within the detection limit.SELECTED DRAWING: Figure 1 |
