| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an image forming method and an image forming apparatus which enable a work clamped by a clamp member to be subjected to an alignment process or the like excluding the clamped region. <P>SOLUTION: The image forming method include the steps of: measuring the position of an exposure reference mark position on a work 100 clamped by a clamp member while relatively conveying a stage 20 mounted with the above work 100 with respect to an exposing unit 28; correcting image information, based on the measured positional information; and exposing by scanning the work by the exposing unit 28, based on the corrected image information to form an image on the exposed surface 101 of the work 100. An exposure region including an error region of the clamp position by the clamp member is regarded as an exposure available region, the work is clamped by the clamp member in a region outside the exposure available region, and the exposure available region is sensed by a detecting means 98 for autofocusing in the exposing unit 28. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
