发明名称 |
Semiconductor inspecting apparatus having device for cleaning tip of probe card and method for cleaning the tip |
摘要 |
An apparatus for inspecting a semiconductor and a method for automatically cleaning the tip of a probe card may include an inspection chamber having a probe card for inspecting a wafer, and a chemical-wetting chamber for applying a chemical agent to a cleaning member. The inspection chamber and the chemical-wetting chamber may be integral parts of the apparatus.
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申请公布号 |
US2007199583(A1) |
申请公布日期 |
2007.08.30 |
申请号 |
US20070711786 |
申请日期 |
2007.02.28 |
申请人 |
CHOI JI-MAN;KIM DUK-KYEOM;MOON BYUNG-JUN;NAM JU-HYUN;LEE IN-CHEOL |
发明人 |
CHOI JI-MAN;KIM DUK-KYEOM;MOON BYUNG-JUN;NAM JU-HYUN;LEE IN-CHEOL |
分类号 |
B08B3/00 |
主分类号 |
B08B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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